F E D
Description Orifice size
[mm]
kv flow factor Freq.
[Hz]
Pressure
(bar)
Vacuum
[Torr]
Power
[W]
Microsol / Interface 3/2 way NC pilot operated - Subbase
3.00 3.00 DC
50
60
1.5 ... 10
0 ... 10
0 ... 10
-
-
-
1
1
1
Microsol / Interface 3/2 way NO pilot operated - Subbase
3.00 3.00 DC
50
60
1.5 ... 10
0 ... 8
0 ... 8
-
-
-
1 - 2
1
1